Review: Fine Embossing of Novel Glasses for Photonic Integrated Circuits

Hot embossing of novel inorganic-compound glasses is a new fabrication technology for guided wave devices and circuitry. A patterned mould is pressed into the glass above its glass transition temperature (T g ) and replicated; cooling below T g freezes-in the required pattern. The state-of-the-art i...

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Bibliographic Details
Published in2007 9th International Conference on Transparent Optical Networks Vol. 2; pp. 280 - 283
Main Authors Seddon, A.B., Furniss, D., Pan, W.J., Sewell, P., Loni, A., Zhang, Y., Benson, T.M.
Format Conference Proceeding
LanguageEnglish
Published IEEE 01.07.2007
Subjects
Embossing
Fiber nonlinear optics
Glass
Nonlinear optics
Optical refraction
Optical sensors
Optical variables control
Optical waveguides
Photonic integrated circuits
Silicon compounds
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Summary:Hot embossing of novel inorganic-compound glasses is a new fabrication technology for guided wave devices and circuitry. A patterned mould is pressed into the glass above its glass transition temperature (T g ) and replicated; cooling below T g freezes-in the required pattern. The state-of-the-art is reviewed. Better than 0.1 mum-scale replication is shown for chalcogenide glasses and fabrication of a hot embossed monomode waveguide demonstrated.
ISBN:9781424412488
142441248X
ISSN:2162-7339
DOI:10.1109/ICTON.2007.4296204