System Level Modeling of Piezo-Resistive Pressure Sensors Including Technology Data and Parasitic Effects

Basically, integrated piezoresistive pressure sensors exhibit parasitic effects that have to be suppressed as necessary. To ensure the proper function of integrated sensing elements design-driven modeling and simulations have to be performed. This kind of modeling and simulation is extremely useful...

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Bibliographic Details
Published inIEEE Sensors, 2005 pp. 1282 - 1285
Main Authors Diener, K.H., Reitz, S., Schneider, P.
Format Conference Proceeding
LanguageEnglish
Published IEEE 2005
Subjects
Analytical models
Circuit simulation
Integrated circuit technology
Manufacturing processes
Mechanical sensors
Piezoresistance
Sensor phenomena and characterization
Sensor systems
Stress
Thermomechanical processes
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Summary:Basically, integrated piezoresistive pressure sensors exhibit parasitic effects that have to be suppressed as necessary. To ensure the proper function of integrated sensing elements design-driven modeling and simulations have to be performed. This kind of modeling and simulation is extremely useful for determining operation characteristics and verifying sensor performance before manufacturing. Thus, the need for test iterations decreases. That is why, cost and time-to-market can be reduced significantly
ISBN:0780390563
9780780390560
ISSN:1930-0395
2168-9229
DOI:10.1109/ICSENS.2005.1597941