Nanometer-Order Control of MEMS Ribbons for Blazed Grating Light Valves

The performance of grating light valve (GLV™) chips can be increased by optimizing their ribbon structures [ 1]. A GLV is a one-dimensional light modulator using diffraction that can be applied to a high definition display by scanning the second dimension. We applied blazed GLV, which diffracts in o...

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Bibliographic Details
Published in19th IEEE International Conference on Micro Electro Mechanical Systems pp. 842 - 845
Main Authors Saruta, K., Kasai, H., Nishida, M., Yamaguchi, M., Ito, Y., Yamashita, K., Taguchi, A., Oniki, K., Tamada, H.
Format Conference Proceeding
LanguageEnglish
Published IEEE 2006
Subjects
Displays
Gratings
Lighting control
Micromechanical devices
Optical control
Optical diffraction
Optical distortion
Optical modulation
Silicon compounds
Valves
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Summary:The performance of grating light valve (GLV™) chips can be increased by optimizing their ribbon structures [ 1]. A GLV is a one-dimensional light modulator using diffraction that can be applied to a high definition display by scanning the second dimension. We applied blazed GLV, which diffracts in only one direction [ 2], and achieved a jump in contrast from 3000:1 to 10000:1. Moreover, we achieved a 55 to 70% improvement in optical efficiency due to nanometer-order control of blazed GLV ribbon. These technologies were applied to the 2005-inch theater system " GxL™ Laser Dream Theater†[ 3, 4].
ISBN:0780394755
9780780394759
ISSN:1084-6999
DOI:10.1109/MEMSYS.2006.1627931