Large area macroporous silicon layers for monocrystalline thin-film solar cells

We produce uniform macroporous double-layers on 6 inch n-type silicon substrates by electrochemical etching under rear side illumination in a hydrofluoric acid (HF)-based electrolyte. The etched area is circular with a diameter of 13 cm. We demonstrate the detachment of 20 μm thick free-standing mac...

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Bibliographic Details
Published in2010 35th IEEE Photovoltaic Specialists Conference pp. 003122 - 003124
Main Authors Ernst, M, Brendel, R
Format Conference Proceeding
LanguageEnglish
Published IEEE 01.06.2010
Subjects
Epitaxial growth
Microscopy
Optical microscopy
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Summary:We produce uniform macroporous double-layers on 6 inch n-type silicon substrates by electrochemical etching under rear side illumination in a hydrofluoric acid (HF)-based electrolyte. The etched area is circular with a diameter of 13 cm. We demonstrate the detachment of 20 μm thick free-standing macroporous silicon layers with an area of 8 × 8 cm 2 .
ISBN:9781424458905
1424458900
ISSN:0160-8371
DOI:10.1109/PVSC.2010.5614496