Resonant frequency analysis for spring-mass structure in high-g MEMS accelerometer

• Published in: 2013 IEEE International Instrumentation and Measurement Technology Conference (I2MTC) pp. 440 - 443
• Main Authors: Zhenya Geng, Vi Shen, Miao Zhang, Muhua Li, Jing Jin
• Format: Conference Proceeding
• Language: English
• Published: IEEE 01.05.2013
• Subjects: Accelerometers; Analytical models; Elasticity; high-g MEMS accelerometer; Micromechanical devices; Resonant frequency; sensitivity capability; Spring-mass structure; Stress; Vibrations
• ISBN: 9781467346214; 1467346217
• ISSN: 1091-5281
• DOI: 10.1109/I2MTC.2013.6555456

Spring-mass structure of high-g MEMS accelerometer is designed based on lumped-parameter analytical models and polymer film-beam constraints structure. The film-beam bone of spring-mass structure is used from silicon and organic polymer film material. The mechanical structure characteristic performs a sort of vibration flexibility to resonant frequency from its single proof-mass movement. According to the result of simulation and analysis, the parameters size of spring-mass structure is obtained to optimize on operational frequency and high-g range. At the same time, its sensitivity capability is improved to high-g MEMS accelerometer. Besides, stress curve and strain situation of the spring-mass structure are obtained by acceleration force opposing motion simulation. These simulation data describes elasticity architecture rationality of mechanical components, which provides favorable help to accomplish coating organic polymer film fabrication. The design and coating polymer fabrication can enhance robustness and stability to high-g MEMS accelerometer.