Nanoindentation study on mechanical properties of Zr(C)N films deposited on NiTi shape memory alloy

Surface nanomechanical properties of ZrN and ZrCN films deposited on NiTi shape memory alloy (SMA) by magnetron sputtering were investigated by nanoindentation study. And their surface deformation mechanism under nanoindentation load was also proposed and discussed by comparison with that of the ele...

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Bibliographic Details
Published in2010 3rd International Nanoelectronics Conference (INEC) pp. 985 - 986
Main Authors Chu, C.L., Ji, H.L., Guo, C., Sheng, X.B., Dong, Y.S., Lin, P.H., Hu, T., Chu, P.K.
Format Conference Proceeding
LanguageEnglish
Published IEEE 01.01.2010
Subjects
Inorganic materials
Laboratories
Magnetic materials
Materials science and technology
Mechanical factors
Microstructure
Physics
Shape memory alloys
Sputtering
Substrates
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Summary:Surface nanomechanical properties of ZrN and ZrCN films deposited on NiTi shape memory alloy (SMA) by magnetron sputtering were investigated by nanoindentation study. And their surface deformation mechanism under nanoindentation load was also proposed and discussed by comparison with that of the electropolished NiTi SMA.
ISBN:9781424435432
1424435439
ISSN:2159-3523
DOI:10.1109/INEC.2010.5425083