Auto-focusing system for microscope based on computational verb controllers

In this paper, an auto-focusing system of microscope for integrated circuits (IC) analysis is presented. In this system, the Laplacian algorithm is used as the evaluation function, which provides a reference to the degree of defocus. The auto-focusing controlling algorithm based on computational ver...

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Bibliographic Details
Published in2008 2nd International Conference on Anti-counterfeiting, Security and Identification pp. 84 - 87
Main Authors Weibin Tang, Yinghao Liao, Zhicong Chen, Lihuan Cai, Tao Yang, Donghui Guo
Format Conference Proceeding
LanguageEnglish
Published IEEE 01.08.2008
Subjects
Algorithm design and analysis
Cameras
Communication system control
Computational Verb
Control systems
Controlling Algorithm
Evaluation Function
Focusing
Laplace equations
Medical control systems
Micromotors
Microscopy
Motion control
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Summary:In this paper, an auto-focusing system of microscope for integrated circuits (IC) analysis is presented. In this system, the Laplacian algorithm is used as the evaluation function, which provides a reference to the degree of defocus. The auto-focusing controlling algorithm based on computational verb theory consists of two controllers designed: the moving-speed controller and the moving-direction controller. Both controllers work well under the verb-control rules designed in this paper. It has shown that the system can focus accurately and quickly, and it can adjust itself when it is out of focus.
ISBN:9781424425846
1424425840
ISSN:2163-5048
2163-5056
DOI:10.1109/IWASID.2008.4688356