Design Space Exploration of Z-Axis CMOS-MEMS Accelerometers

The dimensions of a CMOS-MEMS Z-axis accelerometer are varied in a parametric study that pursues to explore the design space of the spring stiffness that can be achieved by this device. The results of the spring stiffness obtained via simulation will be compared to the one obtained via analytical re...

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Bibliographic Details
Published in2010 IEEE Electronics, Robotics and Automotive Mechanics Conference pp. 745 - 748
Main Authors Méndez, A, Camacho-León, S, Martínez-Chapa, S O
Format Conference Proceeding
LanguageEnglish
Published IEEE 01.09.2010
Subjects
accelerometer
Accelerometers
Analytical models
Capacitance
CMOS-MEMS
Sensors
Space exploration
Springs
Topology
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Summary:The dimensions of a CMOS-MEMS Z-axis accelerometer are varied in a parametric study that pursues to explore the design space of the spring stiffness that can be achieved by this device. The results of the spring stiffness obtained via simulation will be compared to the one obtained via analytical results, to evaluate the accuracy obtained by using the analytical formulas.
ISBN:9781424481491
142448149X
DOI:10.1109/CERMA.2010.88