Monolithically Integrated Piezomems SP2T Switch and Contour-Mode Filters

This paper provides the first experimental demonstration of monolithically integrated piezoelectric MEMS RF switches with contour mode filters. Lead zirconate titanate (PZT) thin films are utilized to enable both low-voltage switch operation and filter tunability. This research leverages previous wo...

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Bibliographic Details
Published in2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems pp. 900 - 903
Main Authors Pulskamp, J.S., Judy, D.C., Polcawich, R.G., Kaul, R., Chandrahalim, H., Bhave, S.A.
Format Conference Proceeding
LanguageEnglish
Published IEEE 01.01.2009
Subjects
Actuators
Fabrication
Micromechanical devices
Piezoelectric films
Radio frequency
Resonator filters
Silicon on insulator technology
Switches
Titanium compounds
Wideband
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Summary:This paper provides the first experimental demonstration of monolithically integrated piezoelectric MEMS RF switches with contour mode filters. Lead zirconate titanate (PZT) thin films are utilized to enable both low-voltage switch operation and filter tunability. This research leverages previous work using PZT actuators for low-voltage, wide-band switches and PZT transduced silicon resonators. The two device technologies are combined using a hybrid fabrication process that combines the key components of each device fabrication into a single unified process using silicon-on-insulator (SOI) substrates. The voltage tunable and switchable PiezoMEMS filter array provides a drop-in solution for frequency-agile channel selectivity.
ISBN:1424429773
9781424429776
ISSN:1084-6999
DOI:10.1109/MEMSYS.2009.4805529