Lithium niobate MEMS devices and subsystems for radio frequency signal processing

• Published in: Conference proceedings : Midwest Symposium on Circuits and Systems pp. 45 - 48
• Main Authors: Songbin Gong, Yong-Ha Song, Manzaneque, Tomas, Ruochen Lu, Yansong Yang, Kourani, Ali
• Format: Conference Proceeding
• Language: English
• Published: IEEE 01.08.2017
• Subjects: Chirp; Electrodes; Internet of Things; Lithium niobate; MEMS; Micromechanical devices; Radio frequency; Resonator filters; Resonators; VCO

This paper presents a review of the recent advances in Lithium Niobate (LiNbOa) micro-electro-mechanical systems (MEMS). Several types of devices and subsystems, including resonators, transformers, filters, and delay lines are discussed, targeting the different functions that are currently sought af...