Lithium niobate MEMS devices and subsystems for radio frequency signal processing

This paper presents a review of the recent advances in Lithium Niobate (LiNbOa) micro-electro-mechanical systems (MEMS). Several types of devices and subsystems, including resonators, transformers, filters, and delay lines are discussed, targeting the different functions that are currently sought af...

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Bibliographic Details
Published inConference proceedings : Midwest Symposium on Circuits and Systems pp. 45 - 48
Main Authors Songbin Gong, Yong-Ha Song, Manzaneque, Tomas, Ruochen Lu, Yansong Yang, Kourani, Ali
Format Conference Proceeding
LanguageEnglish
Published IEEE 01.08.2017
Subjects
Chirp
Electrodes
Internet of Things
Lithium niobate
MEMS
Micromechanical devices
Radio frequency
Resonator filters
Resonators
VCO
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Summary:This paper presents a review of the recent advances in Lithium Niobate (LiNbOa) micro-electro-mechanical systems (MEMS). Several types of devices and subsystems, including resonators, transformers, filters, and delay lines are discussed, targeting the different functions that are currently sought after in radio frequency signal processing for various existing and emerging applications. Technical challenges that remain in the path of deploying these devices are also summarized with a few suggested future research directions.
ISSN:1558-3899
DOI:10.1109/MWSCAS.2017.8052856