MEMS-based passive wireless respiration profile sensor

In this paper we present a sensor that wirelessly records the breathing profile of the human respiratory system. The sensor works passively and does not contain a power source. Furthermore, it is lightweight, robust and flexible making it ideal as a wearable monitoring device. The sensor is made of...

Full description

Saved in:
Bibliographic Details
Published inIEEE SENSORS 2016 : Orlando, Florida, USA, October 30-November 2, 2016 : 2016 proceedings papers pp. 1 - 3
Main Authors Moradian, Sina, Abdolvand, Reza
Format Conference Proceeding
LanguageEnglish
Published IEEE 01.10.2016
Subjects
Antenna measurements
Breath profile
MEMS
Micromechanical devices
Passive
Receiving antennas
Resonant frequency
Resonator
Respiration Profile
RFID
Sensor
Temperature measurement
TPoS
Wireless
Wireless communication
Wireless sensor networks
Online AccessGet full text

Cover

More Information
Summary:In this paper we present a sensor that wirelessly records the breathing profile of the human respiratory system. The sensor works passively and does not contain a power source. Furthermore, it is lightweight, robust and flexible making it ideal as a wearable monitoring device. The sensor is made of a ~902MHz thin film piezoelectric-on-substrate (TPoS) MEMS resonator and an ultra-high frequency (UHF) antenna made of a thin metal film formed on a flexible substrate. The resonance frequency of the TPoS resonator shifts in response to the inhaled/exhaled air flow and a wireless detection technique is utilized to sense the frequency shift and to translate it into the respiration profile. The Respiration profile of a subject is measured and presented for a sensor-to-transceiver distance of ~25cm.
DOI:10.1109/ICSENS.2016.7808422