Observation of the enhancement of the electric field normal to the surface of mid-infrared slot antennas

After growing a thin Al 2 O 3 layer by atomic layer deposition on a Si substrate, slot antenna arrays were formed on it. Reflectivity spectra measured in the mid-infrared range showed characteristic aspects, presumably caused by the surface phonon polariton of a SiO 2 layer naturally formed on the S...

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Bibliographic Details
Published in2013 7th International Congress on Advanced Electromagnetic Materials in Microwaves and Optics pp. 508 - 510
Main Authors Tsushima, K., Mori, S., Nishimura, Y., Hishii, K., Kasahara, K., Yaji, T., Miyazaki, H., Ikeda, N., Ochiai, M., Oosato, H., Sugimoto, Y.
Format Conference Proceeding
LanguageEnglish
Published IEEE 01.09.2013
Subjects
Aluminum oxide
Antenna arrays
Optical reflection
Reflectivity
Silicon
Substrates
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Summary:After growing a thin Al 2 O 3 layer by atomic layer deposition on a Si substrate, slot antenna arrays were formed on it. Reflectivity spectra measured in the mid-infrared range showed characteristic aspects, presumably caused by the surface phonon polariton of a SiO 2 layer naturally formed on the Si substrate. When the Al 2 O 3 layer thickness was 6 nm, such spectral features disappeared. In this way, we could estimate experimentally the electric field distribution normal to the surface of the substrate.
DOI:10.1109/MetaMaterials.2013.6809102