Development of radio-opaque silicon micro needles for medical diagnostics

In this paper, a method of fabricating radio opaque silicon micro needles for tissue labeling applications is reported. Cylindrical shaped micro needles ranging from 7 × 7 to 11 × 11 arrays with a pitch varying from 60 μm to 100μm are fabricated in silicon using a three step mask process. A backside...

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Bibliographic Details
Published in2010 12th Electronics Packaging Technology Conference pp. 84 - 88
Main Authors Lim, Ruiqi, Nandar, Su, Chandrappan, Jayakrishnan, Tang, Shao Qiang, Vaidyanathan, Kripesh, Nagarajan, Ranganathan
Format Conference Proceeding
LanguageEnglish
Published IEEE 01.12.2010
Subjects
Barium
Cavity resonators
Needles
Resists
Silicon
X-ray imaging
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Summary:In this paper, a method of fabricating radio opaque silicon micro needles for tissue labeling applications is reported. Cylindrical shaped micro needles ranging from 7 × 7 to 11 × 11 arrays with a pitch varying from 60 μm to 100μm are fabricated in silicon using a three step mask process. A backside cavity is generated under DRIE for filling the radiopaque material. Barium sulphate is filled in and a biocompatible sealing is provided to hold the radiopaque material inside. The fabricated needles provide a better contrast enhancement under x-ray imaging.
ISBN:9781424485604
1424485606
DOI:10.1109/EPTC.2010.5702611