A micromachined contacting sliding short for high frequency applications

As science probes into the Terahertz region (THz), there is a need for more precise micromachining techniques to fabricate structures such as rectangular waveguides. Additionally, as wavelength decreases there is a greater need for fine tuning of these devices to maximize the amplitude and adequatel...

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Bibliographic Details
Published in2009 IEEE MTT-S International Microwave Symposium Digest pp. 965 - 968
Main Authors Stanec, J.R., Barker, N.S.
Format Conference Proceeding
LanguageEnglish
Published IEEE 01.06.2009
Subjects
Chemical industry
Chemical technology
Coupling circuits
Frequency
Geometry
Micromachining
millimeter wave phase shifters
Phase shifters
Rectangular waveguides
submillimeter wave phase shifters
Submillimeter wave technology
Tunable circuits and devices
tunable devices
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Summary:As science probes into the Terahertz region (THz), there is a need for more precise micromachining techniques to fabricate structures such as rectangular waveguides. Additionally, as wavelength decreases there is a greater need for fine tuning of these devices to maximize the amplitude and adequately change the phase of the signal. The concept presented in this article builds on previous sliding backshort designs and integrates them with lithographic micromachining techniques to increase the flexibility of conventional rectangular waveguides for sub-millimeter waves.
ISBN:1424428033
9781424428038
ISSN:0149-645X
2576-7216
DOI:10.1109/MWSYM.2009.5165859