Chip-packaged silicon photonic nanoscale thermometers

We report on the development of on-chip integrated packaged nanoscale silicon photonic temperature sensors capable of detecting temperature differences as small as 70 μK, thus showing the potential to replace legacy resistance thermometers.

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Bibliographic Details
Published in2016 Conference on Lasers and Electro-Optics (CLEO) pp. 1 - 2
Main Authors Klimov, Nikolai N., Purdy, Thomas, Ahmed, Zeeshan
Format Conference Proceeding
LanguageEnglish
Published OSA 01.06.2016
Subjects
Cavity resonators
Optical waveguides
Silicon photonics
Temperature measurement
Temperature sensors
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Summary:We report on the development of on-chip integrated packaged nanoscale silicon photonic temperature sensors capable of detecting temperature differences as small as 70 μK, thus showing the potential to replace legacy resistance thermometers.
DOI:10.1364/cleo_at.2016.aw1j.6