Thin Film Bulk Acoustic Resonator Vapor Sensors with Single-Walled Carbon Nanotubes-based Nanocomposite Layer
We demonstrate the successful operation of a chemical microsensor based on thin film bulk acoustic resonator (TFBAR) for organic vapor detection at room temperature. The TFBAR consists of a vibrating membrane of AlN/Si 3 N 4 fabricated on silicon substrate and resonating at the frequency of 1.045 GH...
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Published in | 2007 IEEE Sensors pp. 185 - 188 |
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Main Authors | , , , , , , , , |
Format | Conference Proceeding |
Language | English |
Published |
IEEE
01.10.2007
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Subjects | |
Online Access | Get full text |
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Summary: | We demonstrate the successful operation of a chemical microsensor based on thin film bulk acoustic resonator (TFBAR) for organic vapor detection at room temperature. The TFBAR consists of a vibrating membrane of AlN/Si 3 N 4 fabricated on silicon substrate and resonating at the frequency of 1.045 GHz. Using a nanocomposite layer based on Single-Walled Carbon Nanotubes (SWCNTs) and prepared by the Langmuir-Blodgett technique onto the TFBAR device as highly-sensitive nanomaterial, the sensing performance of TFBAR sensor has been evaluated both as a passive device by a network analyzer with phase and insertion loss responses, and as oscillator with frequency response. The vapor sensing characteristics of SWCNTs-based TFBAR sensor are presented illustrating interesting results. |
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ISBN: | 1424412617 9781424412617 |
ISSN: | 1930-0395 2168-9229 |
DOI: | 10.1109/ICSENS.2007.4388367 |