Thin Film Bulk Acoustic Resonator Vapor Sensors with Single-Walled Carbon Nanotubes-based Nanocomposite Layer

We demonstrate the successful operation of a chemical microsensor based on thin film bulk acoustic resonator (TFBAR) for organic vapor detection at room temperature. The TFBAR consists of a vibrating membrane of AlN/Si 3 N 4 fabricated on silicon substrate and resonating at the frequency of 1.045 GH...

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Bibliographic Details
Published in2007 IEEE Sensors pp. 185 - 188
Main Authors Penza, M., Cassano, G., Aversa, P., Suriano, D., Verona, E., Benetti, M., Cannata, D., Di Pietrantonio, F., Wlodarski, W.
Format Conference Proceeding
LanguageEnglish
Published IEEE 01.10.2007
Subjects
Acoustic sensors
Carbon nanotubes
Chemical sensors
Film bulk acoustic resonators
Microsensors
Nanoscale devices
Organic chemicals
Sensor phenomena and characterization
Thin film sensors
Transistors
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Summary:We demonstrate the successful operation of a chemical microsensor based on thin film bulk acoustic resonator (TFBAR) for organic vapor detection at room temperature. The TFBAR consists of a vibrating membrane of AlN/Si 3 N 4 fabricated on silicon substrate and resonating at the frequency of 1.045 GHz. Using a nanocomposite layer based on Single-Walled Carbon Nanotubes (SWCNTs) and prepared by the Langmuir-Blodgett technique onto the TFBAR device as highly-sensitive nanomaterial, the sensing performance of TFBAR sensor has been evaluated both as a passive device by a network analyzer with phase and insertion loss responses, and as oscillator with frequency response. The vapor sensing characteristics of SWCNTs-based TFBAR sensor are presented illustrating interesting results.
ISBN:1424412617
9781424412617
ISSN:1930-0395
2168-9229
DOI:10.1109/ICSENS.2007.4388367