A self-adaptive thermal switch array to stabilize the temperature of MEMS devices

A self-adaptive thermal switch array (TSA) based on actuation by low-melting-point alloy droplets is reported to stabilize the temperature of a heat-generating MEMS device at a predetermined range (i.e., the optimal working temperature of the device) without any control circuit or electrical power c...

Full description

Saved in:
Bibliographic Details
Published in2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS) pp. 148 - 151
Main Authors Xiaobao Geng, Patel, Pragnesh, Meng, Dennis Desheng
Format Conference Proceeding
LanguageEnglish
Published IEEE 01.01.2010
Subjects
Automatic control
Energy consumption
Microelectromechanical devices
Optimal control
Switches
Switching circuits
Temperature control
Temperature distribution
Thermal conductivity
Thermal management
Online AccessGet full text

Cover

More Information
Summary:A self-adaptive thermal switch array (TSA) based on actuation by low-melting-point alloy droplets is reported to stabilize the temperature of a heat-generating MEMS device at a predetermined range (i.e., the optimal working temperature of the device) without any control circuit or electrical power consumption. When the temperature is below this range, the TSA stays off and works as a thermal insulator. Therefore, the MEMS device can quickly heat itself up to its optimal working temperature during startup. Once this temperature is reached, TSA is automatically turned on to increase the thermal conductance, working as an effective thermal spreader. As a result, the MEMS device tends to stay at its optimal working temperature without complex thermal management components and the associated parasitic power loss. The TSA is fabricated and characterized to confirm the proposed working mechanism.
ISBN:1424457610
9781424457618
ISSN:1084-6999
DOI:10.1109/MEMSYS.2010.5442545