Single-use microfluidic pumps and valves based on a thermally responsive PDMS composite

In this work we present active microfluidic liquid handling integrated on-chip with no need for external actuators. The concept is based on a temperature sensitive silicone elastomer composite, consisting of PDMS and expandable microspheres. We successfully fabricated single-use microfluidic pumps a...

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Bibliographic Details
Published in18th IEEE International Conference on Micro Electro Mechanical Systems, 2005. MEMS 2005 pp. 690 - 693
Main Authors Samel, B., Melin, J., Griss, P., Stemme, G.
Format Conference Proceeding
LanguageEnglish
Published IEEE 2005
Subjects
Actuators
Biological materials
Costs
Heat pumps
Liquids
Microchannel
Microfluidics
Reservoirs
Temperature sensors
Valves
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Summary:In this work we present active microfluidic liquid handling integrated on-chip with no need for external actuators. The concept is based on a temperature sensitive silicone elastomer composite, consisting of PDMS and expandable microspheres. We successfully fabricated single-use microfluidic pumps and displaced liquids in the range of nanoliters even against counter pressures up to 100kPa. Moreover, liquid flow in a microchannel was entirely blocked by means of integrated valves. The valves could withstand pressures up to 140kPa. The devices were fabricated entirely from low cost materials and allow wafer-level processing to be used.
ISBN:9780780387324
0780387325
ISSN:1084-6999
DOI:10.1109/MEMSYS.2005.1454023