Fast antenna-coupled terahertz detectors based on uncooled thermoelements

We report on uncooled antenna-coupled thermoelements with a fast response time operating at 0.812 THz. Each sensor pixel consists of 8 thermocouples in series. As thermoelectric structure, a BiSb/Sb freestanding air-bridge is used, fabricated by micromachining. A thermal time constant as low as 22 μ...

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Bibliographic Details
Published in2012 37th International Conference on Infrared, Millimeter, and Terahertz Waves pp. 1 - 3
Main Authors Huhn, A. K., Spickermann, G., Ihring, A., Schinkel, U., Meyer, H., Haring Bolivar, P.
Format Conference Proceeding
LanguageEnglish
Published IEEE 01.09.2012
Subjects
CMOS integrated circuits
Detectors
Frequency modulation
Imaging
Noise
Sensitivity
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Summary:We report on uncooled antenna-coupled thermoelements with a fast response time operating at 0.812 THz. Each sensor pixel consists of 8 thermocouples in series. As thermoelectric structure, a BiSb/Sb freestanding air-bridge is used, fabricated by micromachining. A thermal time constant as low as 22 μs and a NEP of 130 pW/Hz 0.5 at 1 kHz modulation frequency is measured in air at room temperature. The integration capability of the thermocouple sensors enables cost-efficient large-scale detector arrays.
ISBN:9781467315982
1467315982
ISSN:2162-2027
DOI:10.1109/IRMMW-THz.2012.6379495