Broadband terahertz modulation using reconfigurable mesh filters

A broadband terahertz intensity modulator based on MEMS-reconfigurable mesh filters is presented and experimentally demonstrated. Modulator operation is based on reconfiguring the geometry of a multi-layer mesh filter from a capacitive configuration to an inductive configuration, which alters device...

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Bibliographic Details
Published inWAMICON 2013 pp. 1 - 3
Main Authors Unlu, M., Berry, C. W., Li, S., Yang, S.-H, Hashemi, M. R., Jarrahi, M.
Format Conference Proceeding
LanguageEnglish
Published IEEE 01.04.2013
Subjects
Frequency modulation
MEMS switch
Micromechanical devices
Microswitches
modulators
Radio frequency
Terahertz
terahertz time-domain spectroscopy
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Summary:A broadband terahertz intensity modulator based on MEMS-reconfigurable mesh filters is presented and experimentally demonstrated. Modulator operation is based on reconfiguring the geometry of a multi-layer mesh filter from a capacitive configuration to an inductive configuration, which alters device scattering parameters from a low-pass filter to a high-pass filter, respectively. The geometry of the multi-layer mesh filter is chosen to allow cut-off frequencies beyond 3 THz, enabling terahertz modulation over a broad range of frequencies. Additionally, arrays of multi-contact electrostatic MEMS switches are integrated with the multi-layer mesh filter, enabling the required geometry reconfiguration within a fully integrated and high-speed device solution. We experimentally demonstrate more than 65% modulation depth over 1.5 THz frequency band, under a modulation voltage of 30 V and modulation speeds exceeding 20 KHz.
ISBN:1467355364
9781467355360
DOI:10.1109/WAMICON.2013.6572771