None-touched Near-field Optical Nanolithography

Silver nanorods have an excellent effect on the transmitted wave localizing, especially, the intensity of the transmitted wave is strong enough below the bottom of the nanorods. Based on this property, we offer a non-touched optical nanolithographic imaging method, and the structure of the mask is m...

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Published in2006 International Conference on Numerical Simulation of Semiconductor Optoelectronic Devices pp. 83 - 84
Main Authors Chen, S.C., Chang, T.M., Chiu, K.P., Tsai, D.P.
Format Conference Proceeding
LanguageEnglish
Published IEEE 01.09.2006
Subjects
Availability
Nanolithography
Optical arrays
Optical imaging
Optical sensors
Plasmons
Polarization
Shape control
Silicon compounds
Silver
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Summary:Silver nanorods have an excellent effect on the transmitted wave localizing, especially, the intensity of the transmitted wave is strong enough below the bottom of the nanorods. Based on this property, we offer a non-touched optical nanolithographic imaging method, and the structure of the mask is made by silver nanorods which are embedded in a silica block. We numerically prove the availability of the nanolithography in visible domain, and a high resolution of nanolithographic image can be built by a multi-exposures process
ISBN:078039755X
9780780397552
ISSN:2158-3234
DOI:10.1109/NUSOD.2006.306752