Integrated micro-mirrors for compact routing of optical polymer waveguides

We report on micro-mirrors integrated in optical polymer waveguides. The mirrors are fabricated prior to the waveguide core definition step and are based on a selective wet-chemical metallization process.

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Bibliographic Details
Published in2009 IEEE LEOS Annual Meeting Conference Proceedings pp. 20 - 21
Main Authors Lamprecht, T., Beyeler, R., Dangel, R., Horst, F., Jubin, D., Meier, N., Weiss, J., Offrein, B.J.
Format Conference Proceeding
LanguageEnglish
Published IEEE 01.10.2009
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Summary:We report on micro-mirrors integrated in optical polymer waveguides. The mirrors are fabricated prior to the waveguide core definition step and are based on a selective wet-chemical metallization process.
ISBN:9781424436804
142443680X
ISSN:1092-8081
2766-1733
DOI:10.1109/LEOS.2009.5343491