5 Ghz lithium niobate MEMS resonators with high FoM of 153

This paper reports on the demonstration of a new class of super-high frequency (SHF) microelectromechanical system (MEMS) resonators operating in the 5 GHz range. SHF resonances have been achieved using the first order antisymmetric (A1) mode, which features a phase velocity exceeding 10000 m/s in i...

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Bibliographic Details
Published inMEMS : 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems : 22-26 January 2017 pp. 942 - 945
Main Authors Yansong Yang, Anming Gao, Ruochen Lu, Songbin Gong
Format Conference Proceeding
LanguageEnglish
Published IEEE 01.01.2017
Subjects
Couplings
Electrodes
Lithium niobate
Micromechanical devices
Performance evaluation
Resonant frequency
Resonator filters
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Summary:This paper reports on the demonstration of a new class of super-high frequency (SHF) microelectromechanical system (MEMS) resonators operating in the 5 GHz range. SHF resonances have been achieved using the first order antisymmetric (A1) mode, which features a phase velocity exceeding 10000 m/s in ion-sliced and suspended Z-cut Lithium Nio-bate (LiNbO3) thin films. The fabricated device has demonstrated a high electromechanical coupling (k t 2 ) of 29% and a high quality factor (Q) of 527 simultaneously. Consequently, this work marks the first time that MEMS resonators at SHF were demonstrated with an extremely high figure of merit (FoM= kt 2 Q) of 153. The SHF operation and high FoM of these A1 mode devices have showcased their potential as the key building blocks for future SHF front-end filters and multiplexers.
DOI:10.1109/MEMSYS.2017.7863565