Polymer deformable membrane mirrors for focus control using SU-8 2002

Large stroke deformable membrane mirrors are designed for primary focus control and compensation of focus-induced spherical aberration. SU-8 2002 epoxy membranes 2 mum thick and up to 1 cm diameter, with symmetric aluminum coatings, are described.

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Bibliographic Details
Published in2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics pp. 138 - 139
Main Authors Dunbar, E., Leone, M., Lukes, S., Dickensheets, D.L.
Format Conference Proceeding
LanguageEnglish
Published IEEE 01.08.2008
Subjects
Biomembranes
Electrodes
Mirrors
Optical imaging
Optical interferometry
Optical microscopy
Silicon
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Summary:Large stroke deformable membrane mirrors are designed for primary focus control and compensation of focus-induced spherical aberration. SU-8 2002 epoxy membranes 2 mum thick and up to 1 cm diameter, with symmetric aluminum coatings, are described.
ISBN:1424419174
9781424419173
ISSN:2160-5033
DOI:10.1109/OMEMS.2008.4607867