Chemically etched resonant LGS microsensors
Materials like langasite (LGS), langatate (LGT) or gallium orthophosphate (GaPO 4 ) crystals have higher piezoelectric coefficients and also have a better high-temperature behaviour than quartz crystal. Thus they are worth being considered as a replacement for quartz in applications such as oscillat...
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Published in | 2010 IEEE International Frequency Control Symposium pp. 590 - 595 |
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Main Authors | , , , |
Format | Conference Proceeding |
Language | English |
Published |
IEEE
01.06.2010
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Subjects | |
Online Access | Get full text |
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Summary: | Materials like langasite (LGS), langatate (LGT) or gallium orthophosphate (GaPO 4 ) crystals have higher piezoelectric coefficients and also have a better high-temperature behaviour than quartz crystal. Thus they are worth being considered as a replacement for quartz in applications such as oscillators, piezoelectric accelerometers, microbalances or clocks. Length-extension resonators have already been manufactured using quartz crystal in order to get atomically-resolved imaging by frequency-modulation atomic force microscopy. The goal of this study is to obtain better results with langasite. It has been shown that LGS-crystal microsensors should have a sensitivity three times better than quartz crystal ones. This fact added to the existence of temperature-compensated cuts for the extensional mode of vibration is of prime importance for applications such as microcantilevers for frequency-modulation atomic force microscopes. This paper focuses on the fabrication of Langasite resonators with different cut angles around the temperature-compensated cuts both in length-extension and flexure mode. |
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ISBN: | 1424463998 9781424463992 |
ISSN: | 2327-1914 |
DOI: | 10.1109/FREQ.2010.5556259 |