Fabrication of 3D Thin Polymer Structures for Hybrid Sensors and Actuators

This paper presents a novel technique to fabricate complex 3 dimensional thin polymer structures with different geometries on both sides for hybrid sensors and actuators. To realize complex 3D polymer structures, we fabricate a 3D-micromolding aligner which can make two molding masters be aligned wi...

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Bibliographic Details
Published in19th IEEE International Conference on Micro Electro Mechanical Systems pp. 310 - 313
Main Authors Jungyul Park, Jinseok Kim, Dukmoon Roh, Seokho Park, Byungkyu Kim, Kukjin Chun
Format Conference Proceeding
LanguageEnglish
Published IEEE 2006
Subjects
Actuators
Biological materials
Biomembranes
Cardiology
Fabrication
Force measurement
Geometry
Microstructure
Polymers
Valves
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Summary:This paper presents a novel technique to fabricate complex 3 dimensional thin polymer structures with different geometries on both sides for hybrid sensors and actuators. To realize complex 3D polymer structures, we fabricate a 3D-micromolding aligner which can make two molding masters be aligned within 2pm and allows applying high pressure to construct thin membrane under 10im. Using this system, we make thin polymer structure with complex 3D geometries successfully. Generally, complex 3D microstructures are used in microfludics system, such as micromixers, valves and pumps. In this study, we shows a new opportunity of complex 3D structures, that is, as versatile hybrid sensors for understanding structural and functional changes of cells and as micro scale hybrid actuators that can be operated independently without any external power sources.
ISBN:0780394755
9780780394759
ISSN:1084-6999
DOI:10.1109/MEMSYS.2006.1627798