Photonic crystal materials realized by high aspect ratio micro-rod arrays

• Published in: IEEE Photonics Conference 2012 pp. 723 - 724
• Main Authors: Kraeh, C., Schieber, M., Popescu, A., Hedler, H., Finley, J.
• Format: Conference Proceeding
• Language: English
• Published: IEEE 01.09.2012
• Subjects: Optical device fabrication; Optical refraction; Optical variables control; Photonic band gap; Silicon
• ISBN: 9781457707315; 1457707314
• ISSN: 1092-8081; 2766-1733
• DOI: 10.1109/IPCon.2012.6358826

This paper reports on the fabrication and optical properties of a novel type of photonic crystal structure. The structure consists of an array of Si micro-rods with a very high aspect ratio (1:25) on a Si substrate. The fabrication is based on the creation of macroporous Si by a wet-chemical etching technique. Subsequent filling of the pores and selective etching of the Si substrate creates a needle array of the filling material. Up to now we realized rod arrays with poly-Si filled rods. Simulations show that these rod arrays offer unique optical properties and can be used as optical bandgap materials.