Influence of electric field strength on electrochemical formation of macroporous silicon with ordered pore positions

Studying of electric field influence on macroporous silicon formation has been conducted. We have found that formation of the ordered macroporous structure took place at electric field strength exceeding 109 V/m. The electric field strength less than above-mentioned value results in pore extension a...

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Published in2014 24th International Crimean Conference Microwave & Telecommunication Technology pp. 728 - 729
Main Authors Lazarouk, S. K., Dolbik, A. V., Turtsevich, A. S., Shvedau, S. V., Labunov, V. A.
Format Conference Proceeding
LanguageEnglish
Published CriMiCo'2014 Organizing Committee, CrSTC 01.09.2014
Subjects
Silicon
Substrates
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Summary:Studying of electric field influence on macroporous silicon formation has been conducted. We have found that formation of the ordered macroporous structure took place at electric field strength exceeding 109 V/m. The electric field strength less than above-mentioned value results in pore extension and following pore splitting in two.
ISBN:9789663354125
9663354127
DOI:10.1109/CRMICO.2014.6959605