Biophotonic MEMS for single molecule detection and manipulation

• Published in: 2nd Annual International IEEE-EMBS Special Topic Conference on Microtechnologies in Medicine and Biology. Proceedings (Cat. No.02EX578) pp. 363 - 368
• Main Authors: Jeonggi Seo, Kuyper, C.L., Chiu, D.T., Lee, L.P.
• Format: Conference Proceeding
• Language: English
• Published: IEEE 2002
• Subjects: Biomedical optical imaging; Biomembranes; Biophotonics; Bonding; Charge carrier processes; Microelectrodes; Microfluidics; Micromachining; Micromechanical devices; Robotics and automation

The development of biophotonic MEMS for single molecule detection (SMD), manipulation and optical trapping is presented. Integrated cyclic Si/sub x/N/sub y/ microfluidic devices with microelectrodes are fabricated with surface micromachining techniques. Microfluidic channels in the optical windows c...