Biophotonic MEMS for single molecule detection and manipulation

• Published in: 2nd Annual International IEEE-EMBS Special Topic Conference on Microtechnologies in Medicine and Biology. Proceedings (Cat. No.02EX578) pp. 363 - 368
• Main Authors: Jeonggi Seo, Kuyper, C.L., Chiu, D.T., Lee, L.P.
• Format: Conference Proceeding
• Language: English
• Published: IEEE 2002
• Subjects: Biomedical optical imaging; Biomembranes; Biophotonics; Bonding; Charge carrier processes; Microelectrodes; Microfluidics; Micromachining; Micromechanical devices; Robotics and automation
• ISBN: 9780780374805; 0780374800
• DOI: 10.1109/MMB.2002.1002347

The development of biophotonic MEMS for single molecule detection (SMD), manipulation and optical trapping is presented. Integrated cyclic Si/sub x/N/sub y/ microfluidic devices with microelectrodes are fabricated with surface micromachining techniques. Microfluidic channels in the optical windows consist of just Si/sub x/N/sub y/ membrane without substrates. Capability of SMD, manipulation and optical trapping are demonstrated with the Si/sub x/N/sub y/ membrane channels. Such a device can be used in high throughput screening bioassay chips, which require multiplexed processing, SMD, and manipulation capability. Compared with earlier works on microfluidic devices formed by bonding two-glass substrates or polymers, our multiplexed design has attractive features such as bondless nano- and microfluidic channels, low transmission loss, and high stability to temperature and chemicals. The advanced biophotonic MEMS will have characterization and multiple manipulation tools for high-resolution spectroscopic analysis, robotic controls, and microscale lab automations on a chip.