CRLH mm-wave directional coupler on silicon substrate microprocessed by laser ablation

This work deals with the development and manufacturing of a Composite Right / Left Handed (CRLH) coupler structure for the millimeter-wave range. The device is made of CRLH artificial lines in a coplanar waveguide configuration (CPW). The device was processed on a 0.5 mm thick silicon substrate with...

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Bibliographic Details
Published in2011 IEEE International Conference on Microwaves, Communications, Antennas and Electronic Systems (COMCAS 2011) pp. 1 - 4
Main Authors Sajin, G., Bunea, A. C., Craciunoiu, F., Dinescu, A., Zamfirescu, M., Dabu, R.
Format Conference Proceeding
LanguageEnglish
Published IEEE 01.11.2011
Subjects
Capacitors
Coplanar waveguides
Couplers
directional coupler
Laser ablation
Metamaterials
Microwave filters
Silicon
silicon substrate
Substrates
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Summary:This work deals with the development and manufacturing of a Composite Right / Left Handed (CRLH) coupler structure for the millimeter-wave range. The device is made of CRLH artificial lines in a coplanar waveguide configuration (CPW). The device was processed on a 0.5 mm thick silicon substrate with a thermally grown 1 μm SiO 2 layer and a 3000 Å Au / 500 Å Cr metallization layer deposited on it. The silicon substrate offers the possibility of future integration in complex mm-wave circuits. The processing technology was laser ablation, known as a modern method for obtaining the device functional structure.
ISBN:9781457716928
1457716925
DOI:10.1109/COMCAS.2011.6105774