Piezoelectric thin films for a high frequency ultrasound transducer with integrated electronics

Lead zirconate titanate piezoelectric films were integrated into prototype one-dimensional array transducers. The geometry used for transducer arrays is a xylophone-bar type with a length:width aspect ratio greater than 5:1 in order to isolate the desired resonance modes. The PZT and remaining films...

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Bibliographic Details
Published in2010 IEEE Sensors pp. 2186 - 2188
Main Authors Kim, H, Griggio, F, Kim, I S, Choi, K, Tutwiler, R L, Jackson, T N, Trolier-McKinstry, S
Format Conference Proceeding
LanguageEnglish
Published IEEE 01.11.2010
Subjects
Arrays
Biomedical imaging
CMOS integrated circuits
Resonant frequency
Transducers
Ultrasonic imaging
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Summary:Lead zirconate titanate piezoelectric films were integrated into prototype one-dimensional array transducers. The geometry used for transducer arrays is a xylophone-bar type with a length:width aspect ratio greater than 5:1 in order to isolate the desired resonance modes. The PZT and remaining films in the stack were patterned using ion-beam etching and partially released from the underlying silicon substrate by XeF 2 etching. Impedance measurements on the fabricated structures showed resonance frequencies between 3 and 70 MHz for fully and partially released structures depending on the transducer dimensions and vibration modes. In-water transmit and receive functionalities have been demonstrated. A bandwidth on receive of 66 % has been determined for partially released structures.
ISBN:9781424481705
1424481708
ISSN:1930-0395
2168-9229
DOI:10.1109/ICSENS.2010.5690594