The design of a miniature injector for microengineered GC system

This paper describes the design and fabrication of a miniature injector for microengineered gas chromatography (GC) system. Both the injector and the micro GC are to be fabricated on silicon using microengineering technology. The injector system incorporates four miniature valves interconnected usin...

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Bibliographic Details
Published inICSE 2000. 2000 IEEE International Conference on Semiconductor Electronics. Proceedings (Cat. No.00EX425) pp. 85 - 89
Main Authors Wiranto, G., Soegandi, T.M.S., Muljono, M., Widodo, S., Hermida, I.D.P.
Format Conference Proceeding
LanguageEnglish
Published IEEE 2000
Subjects
Actuators
Fabrication
Gas chromatography
Laboratories
Microchannel
Microelectronics
Microfluidics
Microvalves
Silicon
Valves
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Summary:This paper describes the design and fabrication of a miniature injector for microengineered gas chromatography (GC) system. Both the injector and the micro GC are to be fabricated on silicon using microengineering technology. The injector system incorporates four miniature valves interconnected using short microchannels such that a total of 4 nl sample can be injected into the microengineered GC column. This device should also find wide applications in the area of microfluidic systems.
ISBN:9780780364301
0780364309
DOI:10.1109/SMELEC.2000.932439