Thin film bulk acoustic wave devices for applications at 5.2 GHz

Infineon Technologies has started volume manufacturing of bulk acoustic wave (BAW) filters for GSM mobile handset applications in mid 2002. In this paper the feasibility of BAW band filters around 5.2 GHz is discussed. The manufacturing is reviewed and the measurement results are discussed. Latest r...

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Bibliographic Details
Published inIEEE Symposium on Ultrasonics, 2003 Vol. 1; pp. 174 - 177 Vol.1
Main Authors Fattinger, G.G., Kaitila, J., Aigner, R., Nessler, W.
Format Conference Proceeding
LanguageEnglish
Published IEEE 2003
Subjects
Acoustic measurements
Acoustic waves
Bulk acoustic wave devices
GSM
Manufacturing
Mobile communication
Mobile handsets
Q factor
Resonator filters
Thin film devices
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Summary:Infineon Technologies has started volume manufacturing of bulk acoustic wave (BAW) filters for GSM mobile handset applications in mid 2002. In this paper the feasibility of BAW band filters around 5.2 GHz is discussed. The manufacturing is reviewed and the measurement results are discussed. Latest results from manufactured BAW resonators are shown a sufficient performance in order to fulfill the Wireless-LAN communication requirements. The manufactured single resonators show quality factors Q of up to 900 and a piezoelectric coupling factor k/sub eff//sup 2/ of 6.5%.
ISBN:9780780379220
0780379225
DOI:10.1109/ULTSYM.2003.1293382