Demonstration of a micro-CPL based on MEMS fabrication technologies

Utilizing current micro electro mechanical systems (MEMS) technologies, a three-port microcapillary pumped loop (micro-CPL) was designed, fabricated and tested to provide integral cooling to electronics or MEMS type devices. The two wafer design consists of one silicon and one borofloat glass wafer....

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Bibliographic Details
Published inCollection of Technical Papers. 35th Intersociety Energy Conversion Engineering Conference and Exhibit (IECEC) (Cat. No.00CH37022) Vol. 2; pp. 1198 - 1204 vol.2
Main Authors Kirshberg, J., Yerkes, K.L., Liepmann, D.
Format Conference Proceeding
LanguageEnglish
Published IEEE 2000
Subjects
Electronic equipment testing
Electronics cooling
Fabrication
Geometrical optics
Glass
Heating
Mechanical systems
Micromechanical devices
Silicon
System testing
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Summary:Utilizing current micro electro mechanical systems (MEMS) technologies, a three-port microcapillary pumped loop (micro-CPL) was designed, fabricated and tested to provide integral cooling to electronics or MEMS type devices. The two wafer design consists of one silicon and one borofloat glass wafer. An analytical study was used in determining the geometry of the device, including the evaporator dimensions (1000 /spl mu/m/spl times/2000 /spl mu/m) and the length of the liquid and vapor lines (35 mm). Using laser spot heating, the finished device was run near steady-state. It was determined that a laser delivering 8.5 W (+/-0.2 W) with a spotsize diameter of 3.5 mm caused dry-out of the micro-CPL.
ISBN:9781563473753
1563473755
DOI:10.1109/IECEC.2000.870931