The nanomechanical NOSE

We present a novel chemical sensor based on a microfabricated array of silicon cantilevers. Individual cantilevers are sensitized for the detection of analytes using metal coatings. Analyte molecules chemisorbing or physisorbing on the cantilever coating and chemical reactions produce a change in in...

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Published inTechnical Digest. IEEE International MEMS 99 Conference. Twelfth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.99CH36291) pp. 9 - 13
Main Authors Lang, H.P., Baller, M.K., Battiston, F.M., Fritz, J., Berger, R., Ramseyer, J.-P., Fornaro, P., Meyer, E., Guntherodt, H.-J., Brugger, J., Drechsler, U., Rothuizen, H., Despont, M., Vettiger, P., Gerber, Ch, Gimzewski, J.K.
Format Conference Proceeding
LanguageEnglish
Published IEEE 1999
Subjects
Chemical analysis
Chemical sensors
Coatings
Information analysis
Nose
Optical beams
Optical sensors
Sensor arrays
Silicon
Stress
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Summary:We present a novel chemical sensor based on a microfabricated array of silicon cantilevers. Individual cantilevers are sensitized for the detection of analytes using metal coatings. Analyte molecules chemisorbing or physisorbing on the cantilever coating and chemical reactions produce a change in interfacial stress between analyte molecules and cantilever. This leads to a nanomechanical response of the cantilever, i.e. bending. The bending is read out using a time-multiplexed optical beam-deflection technique. From magnitude and temporal evolution of the bending, quantitative information on analyte species and concentration is derived. Here, we demonstrate the detection of ethene and water vapor with such a nanomechanical nose.
ISBN:0780351940
9780780351943
ISSN:1084-6999
DOI:10.1109/MEMSYS.1999.746743