On-wafer calibration techniques for measurement of microwave circuits and devices on thin substrates

Two sets of on-wafer microstrip calibration standards were fabricated on 50 /spl mu/m GaAs and 25 /spl mu/m polyimide substrates for the purpose of measuring microwave circuits and devices up to 50 GHz. The accuracies of one and two tier LRM and TRL calibration techniques were investigated on PHEMT...

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Bibliographic Details
Published inProceedings of 1995 IEEE MTT-S International Microwave Symposium pp. 1045 - 1048 vol.3
Main Authors Pla, J., Struble, M., Colomb, F.
Format Conference Proceeding
LanguageEnglish
Published IEEE 1995
Subjects
Calibration
Gallium arsenide
Measurement standards
Microstrip
Microwave circuits
Microwave devices
Microwave measurements
Microwave theory and techniques
PHEMTs
Polyimides
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Summary:Two sets of on-wafer microstrip calibration standards were fabricated on 50 /spl mu/m GaAs and 25 /spl mu/m polyimide substrates for the purpose of measuring microwave circuits and devices up to 50 GHz. The accuracies of one and two tier LRM and TRL calibration techniques were investigated on PHEMT devices. Substantial improvements were found with the use of a weight function in the averaging of two tier TRL and LRM-TRL calibrations. The dependence of the isolation on the spacing between the input and output probes was also determined for these thin substrates.< >
ISBN:9780780325814
0780325818
ISSN:0149-645X
2576-7216
DOI:10.1109/MWSYM.1995.406151