S0 Mode Lamb Wave Resonators Using LiNbO3 Thin Plate on Acoustic Multilayer Reflector

Lamb wave modes can be classified as a fundamental anti-symmetric mode (A 0 ), a symmetric mode (S 0 ), and their higher order modes. Membrane-type A 1 mode Lamb wave resonators have been reported by the authors for future mobile communication systems. Although the reports show promising results, it...

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Bibliographic Details
Published inJpn J Appl Phys Vol. 52; no. 7; pp. 07HD03 - 07HD03-4
Main Authors Kimura, Tetsuya, Daimon, Katsuya, Ogami, Takashi, Kadota, Michio
Format Journal Article
LanguageEnglish
Japanese
Published The Japan Society of Applied Physics 25.07.2013
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Summary:Lamb wave modes can be classified as a fundamental anti-symmetric mode (A 0 ), a symmetric mode (S 0 ), and their higher order modes. Membrane-type A 1 mode Lamb wave resonators have been reported by the authors for future mobile communication systems. Although the reports show promising results, it is difficult to fabricate the resonators because they have a large dispersion of phase velocity and electromechanical coupling factor, and also are fragile. In this study, the authors suggest a solidly mounted resonator (SMR)-type S 0 mode Lamb wave resonator, which can solve the above-mentioned difficulty. An SMR-type S 0 mode Lamb wave resonator was successfully realized for the first time. The resonator exhibits a 1.5 times faster phase velocity and a 1/3 smaller temperature coefficient of frequency than the commonly used surface acoustic wave (SAW) devices composed of an Al electrode and a 36--48°YX-LiTaO 3 substrate.
Bibliography:(Color online) Schematics of (a) membrane-type A 1 mode Lamb wave resonator and (b) SMR-type S 0 mode Lamb wave resonator. Calculated propagation direction dependence of resonators in thin $X$-cut LiNbO 3 . Calculated LiNbO 3 thickness dependences of resonators in $(90{\degree}, 90{\degree}, 30{\degree})$ LiNbO 3 . Relationship between normalized impedance ratio and total number of layers of acoustic multilayer reflector. (Color online) Calculated characteristics of SMR- and membrane-type S 0 mode Lamb wave resonators. (Color online) Calculated characteristics of S 0 mode Lamb wave resonators with/without acoustic multilayer reflector. (Color online) Schematic of fabricated one-port SMR-type S 0 mode Lamb wave resonator. Measured frequency characteristic of SMR-type S 0 mode Lamb wave resonator.
ISSN:0021-4922
1347-4065
DOI:10.7567/JJAP.52.07HD03