Ferroelectric properties of (Pb,La)(Zr,Ti)O3 capacitors employing Al-doped ZnO top electrodes prepared by pulsed laser deposition under different oxygen pressures

Al-doped ZnO (AZO) top electrodes were deposited under oxygen pressures from 0.02 to 20 Pa using pulsed laser deposition (PLD) to fabricate ferroelectric (Pb,La)(Zr,Ti)O3 capacitors. The oxygen pressure during PLD affected the surface morphology of the AZO top electrodes as well as the ferroelectric...

Full description

Saved in:
Bibliographic Details
Published inJapanese Journal of Applied Physics Vol. 55; no. 6S3
Main Authors Takada, Yoko, Okamoto, Naoki, Saito, Takeyasu, Kondo, Kazuo, Yoshimura, Takeshi, Fujimura, Norifumi, Higuchi, Koji, Kitajima, Akira
Format Journal Article
LanguageEnglish
Japanese
Published The Japan Society of Applied Physics 27.05.2016
Online AccessGet full text

Cover

More Information
Summary:Al-doped ZnO (AZO) top electrodes were deposited under oxygen pressures from 0.02 to 20 Pa using pulsed laser deposition (PLD) to fabricate ferroelectric (Pb,La)(Zr,Ti)O3 capacitors. The oxygen pressure during PLD affected the surface morphology of the AZO top electrodes as well as the ferroelectric properties. In particular, the surface morphologies were dramatically altered by increasing oxygen pressure. We obtained desirable ferroelectric properties with the highest maximum polarization and lowest coercive voltage at around 2.0 Pa. The saturation characteristics, hydrogen degradation resistance, and fatigue resistance were almost unrelated to the oxygen pressure during PLD.
ISSN:0021-4922
1347-4065
DOI:10.7567/JJAP.55.06JB04