(2011). Process Control in Semiconductor Manufacturing. The Control Handbook, 327-344. https://doi.org/10.1201/b10382-20
Chicago Style (17th ed.) Citation"Process Control in Semiconductor Manufacturing." The Control Handbook 2011: 327-344. https://doi.org/10.1201/b10382-20.
MLA (9th ed.) Citation"Process Control in Semiconductor Manufacturing." The Control Handbook, 2011, pp. 327-344, https://doi.org/10.1201/b10382-20.
Warning: These citations may not always be 100% accurate.