A CSM/TFM imaging scheme for Silicon-On-Nothing ScAlN pMUT arrays

This work presents preliminary experimental results on the 2D imaging capability of Silicon-On-Nothing (SON) Scandium-doped Aluminium Nitride (ScAlN) pMUT linear arrays. The Common Source Method (CSM) was used for the array actuation and data acquisition, whereas the Total Focusing Method (TFM) was...

Full description

Saved in:
Bibliographic Details
Published in2022 IEEE International Ultrasonics Symposium (IUS) pp. 1 - 4
Main Authors Sarafianou, Mantalena, Choong, David Sze Wai, Goh, Duan Jian, Chen, Daniel Ssu-Han, Yao, Zhang
Format Conference Proceeding
LanguageEnglish
Published IEEE 10.10.2022
Subjects
Aluminum
Arrays
Focusing
Image resolution
Imaging
Location awareness
Signal resolution
Online AccessGet full text

Cover

More Information
Summary:This work presents preliminary experimental results on the 2D imaging capability of Silicon-On-Nothing (SON) Scandium-doped Aluminium Nitride (ScAlN) pMUT linear arrays. The Common Source Method (CSM) was used for the array actuation and data acquisition, whereas the Total Focusing Method (TFM) was employed for the image reconstruction. This is the first time that the CSM/TFM scheme is deployed together with these pMUT linear array type for imaging. The resulting 2D imaging results have high SNR and offer accurate localization of the reflector position with a mean localization error less than 0.5 mm across all experimental scenarios presented. These results highlight the 2D imaging strength of the novel SON ScAlN pMUTs and their suitability for biomedical and industrial applications.
ISSN:1948-5727
DOI:10.1109/IUS54386.2022.9958238