Preparation of Quantum Hall Effect Device Arrays

The preparation of quantum Hall effect device arrays at the PTB using multiterminal connections has been improved by the use of SiO 2 as insulation material for the multilayer connections. The used lay-out avoids connections crossing the active sections of the devices. Arrays with ten devices in ser...

Full description

Saved in:
Bibliographic Details
Published in2004 Conference on Precision Electromagnetic Measurements pp. 273 - 274
Main Authors Hein, G., Schumacher, B., Ahlers, F.J.
Format Conference Proceeding
LanguageEnglish
Japanese
Published IEEE 01.06.2004
Subjects
Circuit noise
Etching
Gold
Hall effect devices
Insulation
Magnetic field measurement
Resistors
Testing
Voltage
Wires
Online AccessGet full text

Cover

More Information
Summary:The preparation of quantum Hall effect device arrays at the PTB using multiterminal connections has been improved by the use of SiO 2 as insulation material for the multilayer connections. The used lay-out avoids connections crossing the active sections of the devices. Arrays with ten devices in series as well as in parallel have been realised and successfully tested
ISBN:0780384938
9780780384934
DOI:10.1109/CPEM.2004.305569