Broadband Permittivity Extraction from On-Wafer Scattering-Parameter Measurements

We examine a broadband method to extract the dielectric constant and loss tangent of low-loss substrate materials from on-wafer scattering-parameter measurements of coplanar waveguides of different lengths. We compare against multiple-frequency measurements performed with a commercially available sp...

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Bibliographic Details
Published in2008 12th IEEE Workshop on Signal Propagation on Interconnects pp. 1 - 4
Main Authors Arz, U., Leinhos, J.
Format Conference Proceeding
LanguageEnglish
Published IEEE 01.05.2008
Subjects
Coplanar waveguides
Dielectric constant
Dielectric loss measurement
Dielectric materials
Dielectric measurements
Dielectric substrates
Length measurement
Loss measurement
Permittivity measurement
Scattering
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Summary:We examine a broadband method to extract the dielectric constant and loss tangent of low-loss substrate materials from on-wafer scattering-parameter measurements of coplanar waveguides of different lengths. We compare against multiple-frequency measurements performed with a commercially available split-cylinder resonator and show good agreement over a broad frequency range for AF45 and alumina substrates.
ISBN:9781424423170
1424423171
DOI:10.1109/SPI.2008.4558382