A secondary-side phase-shifting ZVS-PWM dual full bridge DC-DC front-end converter for plasma RF power generator

This paper presents a feasibility study of a zero voltage switching (ZVS) PWM dual full bridge (DFB) DC-DC converter with secondary-side phase-shifting power control scheme. The soft-switching PWM DC-DC converter newly-developed for a DC pre-voltage regulator in a plasma radiofrequency (RF) power ge...

Full description

Saved in:
Bibliographic Details
Published in2009 International Conference on Electrical Machines and Systems pp. 1 - 6
Main Authors Mishima, T., Ooue, Y., Fukumoto, Y., Nakaoka, M.
Format Conference Proceeding
LanguageEnglish
Published IEEE 01.11.2009
Subjects
Bridge circuits
DC-DC converter
DC-DC power converters
high-frequency transformer-link
Plasma power generator
Plasmas
Power control
Power generation
power supply
Pulse width modulation
Pulse width modulation converters
Pulse Width Modulation(PWM)
Radio frequency
secondary-side phase shifting(SPS)
Switching converters
Zero voltage switching
Zero Voltage Switching(ZVS)
Online AccessGet full text

Cover

More Information
Summary:This paper presents a feasibility study of a zero voltage switching (ZVS) PWM dual full bridge (DFB) DC-DC converter with secondary-side phase-shifting power control scheme. The soft-switching PWM DC-DC converter newly-developed for a DC pre-voltage regulator in a plasma radiofrequency (RF) power generator can achieve soft commutation at all the power devices under the wide range of load power. By the phase-shifting control scheme that is based on the secondary-side rectifier of the high-frequency (HF) planar transformer, it can attain the effective reduction of idling power in the primary-side inverter stage. In this paper, the essential experimental data obtained from a 100 kHz-2.5 kW prototype is described to validate the soft-switching circuit scheme and discuss the practical effectiveness of the ZVS-PWM DFB DC-DC converter.
ISBN:9781424451777
1424451779
DOI:10.1109/ICEMS.2009.5382822