A 200μW Eddy Current Displacement Sensor with 6.7nmRMS Resolution

This paper describes a low-power eddy current displacement sensor intended for safety-critical touch applications. A sensing inductor is incorporated into a digital PLL to efficiently digitize the displacement of a flexible metal foil. At a stand-off distance of 500μm, the sensor achieves 6.7nm reso...

Full description

Saved in:
Bibliographic Details
Published in2020 IEEE Symposium on VLSI Circuits pp. 1 - 2
Main Authors Pimenta, Matheus, Gurleyuk, Cagri, Walsh, Paul, O'Keeffe, Daniel, Babaie, Masoud, Makinwa, Kofi
Format Conference Proceeding
LanguageEnglish
Published IEEE 01.06.2020
Subjects
Eddy currents
Metals
Phase frequency detector
Phase noise
Quantization (signal)
Sensors
Online AccessGet full text

Cover

More Information
Summary:This paper describes a low-power eddy current displacement sensor intended for safety-critical touch applications. A sensing inductor is incorporated into a digital PLL to efficiently digitize the displacement of a flexible metal foil. At a stand-off distance of 500μm, the sensor achieves 6.7nm resolution in a 3kHz bandwidth over a 43μm range. It consumes 200μW from a 1.8V supply, which represents a 35× improvement on the state of the art.
ISSN:2158-5636
DOI:10.1109/VLSICircuits18222.2020.9162849