On the Design of a MEMS Multisensor Instrument for Aerodynamic Pressure Measurements

In this paper we present the concept of a novel MEMS multisensor instrument for aerodynamic pressure measurements, and discuss the main aspects of its design. Designing of such instrument is a complex task, especially because of high requirements regarding miniaturization, measurement performance, t...

Full description

Saved in:
Bibliographic Details
Published in2024 11th International Conference on Electrical, Electronic and Computing Engineering (IcETRAN) pp. 1 - 4
Main Authors Frantlovic, Milos, Lazic, Zarko, Smiljanic, Milce, Jokic, Ivana, Poljak, Predrag, Nesic, Dusan, Vorkapic, Milos, Tanaskovic, Dragan
Format Conference Proceeding
LanguageEnglish
Published IEEE 03.06.2024
Subjects
Aerodynamics
Digital signal processing
Fault detection
Hardware
instrument
Instruments
MEMS
Micromechanical devices
multisensor
pressure
Pressure measurement
Semiconductor device measurement
Spatial coherence
Testing
Online AccessGet full text

Cover

More Information
Summary:In this paper we present the concept of a novel MEMS multisensor instrument for aerodynamic pressure measurements, and discuss the main aspects of its design. Designing of such instrument is a complex task, especially because of high requirements regarding miniaturization, measurement performance, the number of pressure measurement channels, and other features. The main goal of the presented work is to address these requirements in an innovative way. A novel multisensor chip, which has been designed and fabricated, is an important step towards further miniaturization and higher measurement performance of aerodynamic pressure measurement instruments. Multisensor modules, which contain the multisensor chips and accompanying connections and circuitry, enable modularity and reconfigurability of the instrument. The novel hardware architecture has a separate signal path for each of the pressure channels, and is capable of synchronous pressure measurement on all channels. Digital signal processing enables high measurement performance, and can be used to implement fault detection capabilities. The final goal of the presented work is to combine these concepts into a high-performance and innovative instrument for aerodynamic testing, which is a useful tool for several scientific and industrial fields.
DOI:10.1109/IcETRAN62308.2024.10735438