Study of N2 He DC glow discharge

Optical emission spectroscopy and mass spectrometry measurement were used to study a gas mixture glow discharge of He and N2 at total pressure of 2.0 Torr, a power of 10 W and a flow of 16.5 l min. The emission bands were measured in the wavelength range of 200 to 1100 nm. The principal species obse...

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Bibliographic Details
Published inJournal of physics. Conference series Vol. 591; no. 1
Main Authors Villa, M, Flores, O, Castillo, F, Reyes, P G, Martinez, H
Format Journal Article
LanguageEnglish
Published Bristol IOP Publishing 24.03.2015
Subjects
Emission analysis
Gas mixtures
Glow discharges
Mass spectrometry
Optical emission spectroscopy
Physics
Scientific imaging
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Summary:Optical emission spectroscopy and mass spectrometry measurement were used to study a gas mixture glow discharge of He and N2 at total pressure of 2.0 Torr, a power of 10 W and a flow of 16.5 l min. The emission bands were measured in the wavelength range of 200 to 1100 nm. The principal species observed were N2+ (B2Σ+u→X2Σ+g), N2 (C3Πu→B3Πg), and He, which agree with mass spectrometry measurement.
ISSN:1742-6588
1742-6596
DOI:10.1088/1742-6596/591/1/012067