Vapor transport deposition of cadmium telluride films

Polycrystalline CdTe thin films are grown by vapor transport deposition onto moving substrates using a linear cross-web source for operation at low vacuum and high growth temperature. The source design, based on delivery of a carrier gas saturated with Cd and Te/sub 2/ vapors, overcomes the limitati...

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Bibliographic Details
Published inConference Record of the Twenty-Ninth IEEE Photovoltaic Specialists Conference, 2002 pp. 547 - 550
Main Authors McCandless, B.E., Birkmire, R.W., Buchanan, W.A.
Format Conference Proceeding
LanguageEnglish
Published Piscataway NJ IEEE 2002
Subjects
Applied sciences
Cadmium compounds
Cascading style sheets
Chemical vapor deposition
Elementary particle vacuum
Energy
Energy conversion
Exact sciences and technology
Natural energy
Photovoltaic conversion
Semiconductor films
Semiconductor materials
Solar cells. Photoelectrochemical cells
Solar energy
Sputtering
Substrates
Temperature
Solar cell
Vapor deposition
Manufacturing process
Cadmium tellurides
Thin film
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Summary:Polycrystalline CdTe thin films are grown by vapor transport deposition onto moving substrates using a linear cross-web source for operation at low vacuum and high growth temperature. The source design, based on delivery of a carrier gas saturated with Cd and Te/sub 2/ vapors, overcomes the limitations of other vapor deposition methods. Models for vapor transport deposition and radiative transfer within the source facilitate a quantitative understanding of source behavior leading to control of film deposition. The deposition has been characterized over a wide range of operating parameters. Dense, single phase device quality CdTe films have been fabricated. Deposition of other compound semiconductor materials has also been demonstrated.
ISBN:9780780374713
0780374711
ISSN:1060-8371
DOI:10.1109/PVSC.2002.1190623