Micromachined mid-infrared emitter for fast transient temperature operation for optical gas sensing systems

A novel micromachined thermal emitter for fast transient temperature operation is presented. Most commercial available thermal emitters are not able to operate in a pulsed mode. The spider type hotplate concept promises an excellent mechanical stability together with high thermal decoupling. The the...

Full description

Saved in:
Bibliographic Details
Published in2008 IEEE Sensors pp. 297 - 300
Main Authors Hildenbrand, J., Kurzinger, A., Peter, C., Moretton, E., Wollenstein, J., Naumann, F., Ebert, M., Korvink, J.
Format Conference Proceeding
LanguageEnglish
Published IEEE 01.10.2008
Subjects
Biomembranes
Electromagnetic wave absorption
Optical filters
Optical sensors
Optical variables control
Pollution measurement
Stimulated emission
Suspensions
Temperature sensors
Wavelength measurement
Online AccessGet full text

Cover

More Information
Summary:A novel micromachined thermal emitter for fast transient temperature operation is presented. Most commercial available thermal emitters are not able to operate in a pulsed mode. The spider type hotplate concept promises an excellent mechanical stability together with high thermal decoupling. The thermal emitter is fabricated using silicon on insulator (SOI) technology and KOH-etching. The emitter is heated with a Pt-meander structure and the device is mounted in a TO-5 housing. Different suspensions structures as well as hotplate sizes were realized and mechanical and thermal characterizations were performed. Beside the possibility of pulsed operation, a high thermal emission at wavelengths >5 mum are achieved. Investigations on possible coatings for emissivity enhancement are the focus of the current work.
ISBN:1424425808
9781424425808
ISSN:1930-0395
2168-9229
DOI:10.1109/ICSENS.2008.4716440